{"schema_version":1,"experiment_id":"eoa_inverse_innovation_exp09_archetype_breadth150_20260804","cell_id":"layer_decay_and_expiration_management__chemistry_materials","arm":"BREADTH_PROBE_ONE_SHOT","candidate_id":"layer_decay_and_expiration_management__chemistry_materials__P1","proposal_index":1,"version":0,"title":"Lifecycle Passports for Reactor-Wall Deposit Layers","problem":"In a multi-recipe thin-film deposition reactor, successive production runs leave chronological coating layers on shields, liners, and chamber walls. The deposits may initially help stabilize surface chemistry but later crack, flake, outgas, or retain material from incompatible recipes. Maintenance is commonly triggered by a fixed run count or a current particle alarm because the deposited strata lack identities, age indices, recipe provenance, dependency status, and differentiated expiration rules. This makes it difficult to distinguish a still-useful seasoned surface from an expired deposit stack requiring controlled disposition.","actors":["thin-film process engineer","reactor maintenance technician","materials characterization specialist","production scheduler","quality engineer","equipment safety owner"],"observable_state":"For each chamber zone, the observable state is an estimated chronological stack of recipe-associated deposits with cumulative thickness or mass, thermal and plasma exposure, elapsed time, incompatible-material transitions, particle or drift observations, lifecycle state, and any process dependency or preservation hold; currently these attributes are scattered across run logs or absent from maintenance decisions.","consequence":"A deposit stack can remain in service after its mechanical or chemical risk has changed, allowing particles or cross-recipe carryover to affect wafers, while premature blanket cleaning can remove a process-stabilizing surface condition, consume production time, and obscure which accumulated layer prompted maintenance.","affected_objective":"Maintain thin-film process reproducibility and particle control while bounding unnecessary chamber cleaning and preserving traceability between deposited material history and maintenance decisions.","intervention":"Create a deposit-layer passport for each replaceable liner, shield, and defined chamber zone. Each run appends a layer record containing material family, recipe, timestamp, estimated deposited amount, exposure history, and lot linkage. An age-weighted value-and-risk rule moves the stack among seasoned-active, review-needed, archived-by-record, quarantine, and expired-for-cleaning states. Expiration can be triggered by cumulative stress proxy, incompatible recipe transition, validation failure, or particle evidence, but a dependency-safe delete check first asks whether the existing surface condition is required by a qualified recipe. At an already authorized maintenance opening, expired liners or deposits are removed through the approved procedure; photographs, a representative coupon when safe, and a tombstone record preserve the removed stack's identity. Rules remain advisory during the first pilot.","structural_mapping":[{"archetype_element":"layer_inventory_and_identity_map","domain_realization":"A passport links each chamber zone or replaceable component to the sequence of films deposited during identifiable recipe campaigns."},{"archetype_element":"deposition_order_and_age_index","domain_realization":"Run timestamps, cumulative exposure, thermal cycles, plasma dose, and estimated thickness establish order and effective age rather than relying only on calendar time."},{"archetype_element":"decay_function_or_aging_rule","domain_realization":"A review score increases when accumulated stress proxies, thermal history, incompatible material transitions, or unexplained particle observations indicate that a deposit stack may no longer be serviceable."},{"archetype_element":"expiration_trigger_definition","domain_realization":"Preapproved thresholds mark a zone review-needed or expired-for-cleaning; they do not autonomously command equipment work."},{"archetype_element":"dependency_and_reconstruction_check","domain_realization":"Before cleaning, engineers check whether qualified recipes depend on the chamber's current seasoned surface and whether the layer history can be reconstructed from run records."},{"archetype_element":"preservation_exception_register","domain_realization":"A named, time-bounded hold preserves a stack needed for an active qualification, failure investigation, or materials analysis."},{"archetype_element":"pruning_or_archival_pathway","domain_realization":"Disposition separates continued use, requalification, replaceable-liner removal, approved in-situ cleaning, and complete chamber cleaning instead of treating all expiration as blanket removal."},{"archetype_element":"deletion_audit_and_rollback_window","domain_realization":"Pre-clean measurements, photographs, retained safe coupons, removed-part identifiers, and post-clean qualification results preserve evidence and a limited route to reconstruct the prior condition."},{"archetype_element":"review_cadence_and_revalidation_loop","domain_realization":"Process and maintenance owners periodically compare passport states with inspections, particles, and process-control observations and adjust only through controlled change review."}],"mechanism_mapping":[{"mechanism_slug":"age_weighted_value_score","role":"Combines effective age, estimated load, material compatibility, validation status, and evidence of process value to prioritize review of particular chamber zones.","counterfactual_removal":"Without the score, all old deposits are treated alike, so useful seasoning and high-risk aged stacks remain indistinguishable until a fixed deadline or failure."},{"mechanism_slug":"dependency_safe_delete_check","role":"Blocks cleaning or component replacement until qualified-recipe dependencies, investigation holds, and reconstruction needs have been examined.","counterfactual_removal":"Without this check, expiration could erase a stabilizing surface condition or destroy evidence needed to interpret a process excursion."},{"mechanism_slug":"soft_delete_quarantine_window","role":"When practical and safe, removed replaceable liners or representative coupons are sealed, labeled, and held for a bounded interval through post-clean qualification before disposal.","counterfactual_removal":"Without the bounded hold, a failed post-clean qualification may be impossible to compare with or investigate against the removed deposit state."},{"mechanism_slug":"tombstone_or_deletion_marker","role":"Leaves a durable record of what deposit stack was removed, when, why, by whose authority, and through which approved procedure.","counterfactual_removal":"Without the tombstone, later particle or reproducibility investigations encounter a discontinuity in chamber history and may mistake the new surface state for continuity."}],"causal_chain":["Successive recipes create identifiable chronological material deposits on reactor internals.","Thermal cycling, accumulated thickness, plasma exposure, and material transitions change the deposits' mechanical and chemical condition.","Without lifecycle states, those changes remain compressed into a single run count or become visible only after particle or process alarms.","Layer passports make deposition order, effective age, compatibility transitions, dependencies, and exceptions inspectable by chamber zone.","Explicit review and expiration rules identify a subset of stacks for revalidation or disposition while preserving stacks with documented process value.","A dependency check and bounded quarantine prevent an expiration signal from becoming immediate irreversible removal.","Approved cleaning or liner replacement removes the selected expired stack, while tombstones and samples preserve accountability.","Post-maintenance qualification feeds observations back into the aging rule and the next review decision."],"baseline":"Fixed-interval preventive maintenance supplemented by reactive cleaning after particle alarms or process-control excursions, with engineers informally consulting run logs and experience but without zone-specific layer identities, differentiated lifecycle states, dependency checks, or preserved deletion evidence.","nearest_rivals":["Fixed wafer-count or elapsed-time chamber cleaning","Condition-based maintenance driven only by current particle monitors","Recipe-family scheduling that reduces incompatible material transitions","Blanket replacement of chamber liners during preventive maintenance","In-situ chamber-clean endpoint monitoring"],"remaining_contrastive_claim":"The distinguishing design claim is that the controlled object is the chronological, zone-specific deposit stack: maintenance disposition depends jointly on layer identity, effective age, material transition, process dependency, and recoverability. A fixed interval governs the reactor as one aging unit, and a particle alarm governs a current symptom; neither by itself provides lifecycle states and deletion evidence for accumulated strata.","authority_safety":{"decision_authority":"The equipment safety owner retains authority over chamber access and cleaning methods; the process engineering manager owns lifecycle-rule approval; quality must approve any change affecting qualified recipes. The passport score has no autonomous maintenance authority.","authorized_first_step":"During one already scheduled maintenance opening, the authorized team may collect non-destructive photographs and approved thickness or mass measurements from existing shields, liners, or witness locations, reconstruct the preceding recipe sequence, and run the proposed score in shadow mode through the next 20 lots.","excluded_actions":["Opening a reactor outside an approved maintenance state","Introducing an unqualified witness material into the process chamber","Changing cleaning chemistry, plasma parameters, or exposure duration","Automatically stopping production or commanding a clean from the score","Scraping, sampling, retaining, or transporting deposits without materials-hazard approval","Discarding investigation holds or qualified-recipe dependencies","Applying the pilot rule to other reactors without review"],"halt_rollback":"Halt data collection if chamber access, sampling, or retained material creates an equipment, contamination, chemical-exposure, or chain-of-custody concern. Disable the advisory score and revert decisions to the existing maintenance procedure if it conflicts with safety controls, qualified process limits, or approved maintenance instructions; retain the pilot ledger for audit without using it operationally."},"negative_tests":{"strongest_counterevidence":"Zone-specific deposit age, recipe transitions, estimated load, and lifecycle score show no stable relationship with inspection condition, particle observations, or process drift, while the existing fixed schedule predicts maintenance findings at least as consistently.","problem_falsifier":"Inspection during scheduled openings finds no meaningfully distinguishable chronological or zone-specific deposit states, or observed failures arise from fresh single-run deposition rather than accumulated layers, so treating deposits as a lifecycle-managed stack adds no relevant state.","intervention_falsifier":"The shadow passport repeatedly marks low-concern zones for expiration, fails to flag zones later associated with adverse inspection or process observations, or cannot be populated reproducibly from run and maintenance records.","risks":["Estimated wall deposition may be a poor proxy for actual local thickness, composition, adhesion, or stress.","A scoring rule could create false confidence and delay an otherwise warranted clean.","Over-conservative expiration thresholds could increase downtime and consumable use.","Treating seasoning as valuable could preserve a surface that is chemically contaminated.","Sampling or retaining deposits may introduce worker-exposure, contamination, or waste-handling hazards.","Recipe and maintenance records may be insufficient to reconstruct historical stacks.","Lifecycle exceptions could become permanent holds unless they expire and receive review.","Operators might interpret an advisory state as an automated safety or quality determination."]},"next_evidence_step":"On one reactor and without changing its maintenance date, reconstruct the preceding 20-lot layer sequence for two accessible chamber zones; at the scheduled opening, compare blind predeclared passport classifications with approved photographs, thickness or mass measurements, deposit-condition observations, particle-monitor history, and process-control residuals. Record missing-data rate, inter-rater agreement on lifecycle state, false alerts, missed concerning zones, and whether the dependency check changes any proposed disposition. Stop after the next 20 production lots and one post-maintenance qualification review.","prior_art_status":"UNSEARCHED","diversity_from_prior_proposals":"No comparison with prior proposals was performed under runtime isolation; this candidate is instantiated solely as lifecycle governance of physical, sequential reactor-wall deposit strata in thin-film materials processing.","revision_record":{"parent_version":null,"progress_targets_addressed":[],"conceptual_changes":[],"operational_changes":[],"evidence_changes":[],"claim_changes":[]}}