Surface finish improvement of an unpolished silicon wafer using micro-laser assisted machining

Hossein Mohammadi, H. B. P., Ravindra, D., & Patten, J. A. (2015). Surface finish improvement of an unpolished silicon wafer using micro-laser assisted machining.

Type

Unclassified

Intellectual base

Unclassified

Year

2015

DOI

10.1504/ijat.2015.073805

Link

https://doi.org/10.1504/ijat.2015.073805

Cited by

1 citation across 1 artifact.

Domain-specific

• Diamond turning
  • … and a convenient observable transfers from A computer-controlled lathe cuts an aspheric aluminum mirror directly to optical figure before coating. to Process planning accounts for material compatibility, tool wear, thermal drift, vibration and metrology and does not assume every hard material is diamond-turnable..

Verification

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Registry ID ref:51494830f7ef · see in the full table