Optical contacting of low-expansion materials¶
Kalkowski, G., Risse, S., Rothhardt, C., & Rohde, M. (2011). Optical contacting of low-expansion materials. Proceedings of SPIE, 2-3.
Cited by¶
1 citation across 1 artifact.
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Domain-specific¶
- Optical contact bonding
- Kalkowski and colleagues discuss related glass direct-bonding technology with refined surface activation and thermal or load conditions; they themselves say direct bonding can be the more exact label for their process.
This sourceThe small unbound-rim observation belongs to the separately treated direct-bonded wafers in the Abstract and is not a universal initial-contact criterion.
- Kalkowski and colleagues discuss related glass direct-bonding technology with refined surface activation and thermal or load conditions; they themselves say direct bonding can be the more exact label for their process.
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